JPS645745B2 - - Google Patents
Info
- Publication number
- JPS645745B2 JPS645745B2 JP55105328A JP10532880A JPS645745B2 JP S645745 B2 JPS645745 B2 JP S645745B2 JP 55105328 A JP55105328 A JP 55105328A JP 10532880 A JP10532880 A JP 10532880A JP S645745 B2 JPS645745 B2 JP S645745B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- charged particle
- ion
- energy
- energy analyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 23
- 238000005211 surface analysis Methods 0.000 claims description 12
- 230000005855 radiation Effects 0.000 claims description 10
- 238000004458 analytical method Methods 0.000 claims description 9
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 23
- 238000000034 method Methods 0.000 description 8
- 238000004969 ion scattering spectroscopy Methods 0.000 description 4
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10532880A JPS5730254A (en) | 1980-07-30 | 1980-07-30 | Complex surface analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10532880A JPS5730254A (en) | 1980-07-30 | 1980-07-30 | Complex surface analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5730254A JPS5730254A (en) | 1982-02-18 |
| JPS645745B2 true JPS645745B2 (en]) | 1989-01-31 |
Family
ID=14404647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10532880A Granted JPS5730254A (en) | 1980-07-30 | 1980-07-30 | Complex surface analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5730254A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0725124B2 (ja) * | 1988-09-08 | 1995-03-22 | 積水化成品工業株式会社 | 樹脂成形用冷却装置 |
-
1980
- 1980-07-30 JP JP10532880A patent/JPS5730254A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5730254A (en) | 1982-02-18 |
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